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Study of SiN, SiON and Mg-Si-O-N thin films by spec-troscopic elipsometry
Linnaeus University, Faculty of Technology, Department of Built Environment and Energy Technology. (Glass group)
Linnaeus University, Faculty of Technology, Department of Built Environment and Energy Technology. (Glass group)
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2016 (English)In: Optics and photonics conference, 2-3 November, 2016, Linköping, Sweden, 2016Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2016.
National Category
Ceramics
Research subject
Natural Science, Physics; Technology (byts ev till Engineering), Glass Technology
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URN: urn:nbn:se:lnu:diva-72850OAI: oai:DiVA.org:lnu-72850DiVA, id: diva2:1197844
Conference
Optics and photonics conference, 2-3 November, 2016, Linköping, Sweden
Available from: 2018-04-15 Created: 2018-04-15 Last updated: 2018-10-22Bibliographically approved

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Ali, SharafatJonson, Bo

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CiteExportLink to record
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  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
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