lnu.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Preparation and tunable optical properties of amorphous AlSiO thin films
Linköping Univeristy, Sweden.
Linköping Univeristy, Sweden.
Linköping Univeristy, Sweden.
Linköping Univeristy, Sweden.
Show others and affiliations
2021 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 187, article id 110074Article in journal (Refereed) Published
Sustainable development
SDG 9: Build resilient infrastructure, promote inclusive and sustainable industrialization, and foster innovation, SDG 12: Ensure sustainable consumption and production patterns
Abstract [en]

Thin films in the aluminosilicate (AlSiO) system containing up to 31 at. % Al and 23 at. % Si were prepared by reactive RF magnetron co-sputtering in order to investigate the dependence of film formation and optical properties on substrate temperature and Si and Al contents. The obtained films were amorphous with smooth microstructure. The growth rate at different substrate temperatures ranged from 1.2 to 3.3 nm/min and increase with increasing the Si target power. The roughness decreases and thickness increases with increasing Si content. The thickness of the films grown at a deposition temperature of 100 °C is found to be higher than the films deposited at 300 and 500 °C. The AlSiO-coated glasses have a higher transmission in the visible region than the uncoated glass. The spectroscopic ellipsometry analysis reveals that the refractive index value decreased with decreasing the Al content, having extinction coefficient values of zero in the measured spectral region and band gap values ≥ 3.4 eV. The obtained thin films have over 90% transmittance in the visible range and no systematic variation of transmittance was observed with substrate temperature. The results suggest that glass substrate coated with AlSiO thin films have improved optical properties. 

Place, publisher, year, edition, pages
Elsevier, 2021. Vol. 187, article id 110074
Keywords [en]
Al-Si-O thin films; Sputtering; High Al content; Extinction coefficient; Refractive index; Mueller matrix ellipsometry
National Category
Chemical Engineering Ceramics and Powder Metallurgical Materials Manufacturing, Surface and Joining Technology
Research subject
Technology (byts ev till Engineering), Glass Technology; Natural Science, Chemistry; Physics, Condensed Matter Physics
Identifiers
URN: urn:nbn:se:lnu:diva-101102DOI: 10.1016/j.vacuum.2021.110074ISI: 000635485100001Scopus ID: 2-s2.0-85099860204Local ID: 2021OAI: oai:DiVA.org:lnu-101102DiVA, id: diva2:1527316
Available from: 2021-02-10 Created: 2021-02-10 Last updated: 2025-02-09Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records

Jonson, BoAli, Sharafat

Search in DiVA

By author/editor
Jonson, BoAli, Sharafat
By organisation
Department of Built Environment and Energy TechnologyAdvanced Materials
In the same journal
Vacuum
Chemical EngineeringCeramics and Powder Metallurgical MaterialsManufacturing, Surface and Joining Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 101 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf