lnu.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Nanoparticles for long-term stable, more selective MISiCFET gas sensors
Växjö University, Faculty of Mathematics/Science/Technology, School of Technology and Design. (Bioenergiteknik)
Växjö University, Faculty of Mathematics/Science/Technology, School of Technology and Design. (Bioenergiteknik)
2005 (English)In: Sensors and Actuators B, ISSN 0925-4005, Vol. 107, no 2, p. 831-838Article in journal (Refereed) Published
Abstract [en]

Synthesis of metal-oxide nanoparticles and utilization of these particles as gate materials for field-effect sensor devices is reported. Improved

selectivity to specific gases is expected by modulating the size of the oxide nanoparticles or impregnating them with catalytic metals. Another

objective is to improve the long-term thermal stability of the sensors, since the metal loaded nanoparticles may prevent thermally induced

restructuring of the gate layer, which is often a problematic issue for the catalytic metal layers. Because of its reasonably high electrical

conductivity, which is especially important for the capacitive gas sensors, ruthenium dioxide has been identified to be one of the potential

candidates as gate material for the field-effect sensor devices. Interestingly, this material has been found to change its resistivity in different

gaseous ambients. When used as a gate material, sensitivity to reducing gases has been observed for the RuO2/SiO2/4H-SiC capacitors.

Changes in the resistivity of the films due to various gas exposures have also been recorded. Morphological studies of nanoparticles (SiO2

and Al2O3), loaded or impregnated with catalytic metals (e.g. Pt), have been performed.

Place, publisher, year, edition, pages
Elsevier , 2005. Vol. 107, no 2, p. 831-838
Keywords [en]
Sensors; Catalytic material; MISiCFET; Ruthenium dioxide
National Category
Energy Engineering Materials Engineering
Research subject
Technology (byts ev till Engineering), Bioenergy Technology
Identifiers
URN: urn:nbn:se:vxu:diva-4226OAI: oai:DiVA.org:vxu-4226DiVA, id: diva2:204183
Available from: 2007-03-02 Created: 2007-03-02 Last updated: 2010-10-25Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

http://www.sciencedirect.com/science/journal/09254005

Authority records BETA

Sanati, MehriStrand, Michael

Search in DiVA

By author/editor
Sanati, MehriStrand, Michael
By organisation
School of Technology and Design
Energy EngineeringMaterials Engineering

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 30 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf