lnu.sePublications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Novel transparent Mg-Si-O-N thin films with high hardness and refractive index
Linnaeus University, Faculty of Technology, Department of Built Environment and Energy Technology.
Linköping University.
Linköping University.
Linköping University.
Show others and affiliations
2016 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 131, p. 1-4Article in journal (Refereed) Published
Abstract [en]

There is an increasing demand for glass materials with better mechanical and optical properties for display and electronic applications. This paper describes the deposition of novel thin films of Mg-Si-O-N onto float glass substrates. Amorphous thin films in the Mg-Si-O-N system with high nitrogen and magnesium contents were deposited by reactive RF magnetron co-sputtering from Mg and Si targets in Ar/N2/O2 gas mixtures. The thin films studied span an unprecedented range of compositions up to 45 at% Mg and 80 at% N out of cations and anions respectively. Thin films in the Mg-Si-O-N system were found to be homogeneous and transparent in the visible region. Mechanical properties like hardness (H) and reduced elastic modulus (Er) show high values, up to 21 GPa and 166 GPa respectively. The refractive index (1.87-2.00) increases with increasing magnesium and nitrogen contents.

Place, publisher, year, edition, pages
2016. Vol. 131, p. 1-4
Keyword [en]
Hardness, High nitrogen content, Magnetron sputtering, Oxynitride thin films, Refractive index
National Category
Inorganic Chemistry
Research subject
Natural Science, Chemistry
Identifiers
URN: urn:nbn:se:lnu:diva-56070DOI: 10.1016/j.vacuum.2016.05.023ISI: 000381541400001Scopus ID: 2-s2.0-84973473660OAI: oai:DiVA.org:lnu-56070DiVA, id: diva2:971443
Funder
EU, European Research Council, FP/2007e2013
Available from: 2016-09-16 Created: 2016-08-31 Last updated: 2017-11-21Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records BETA

Ali, SharafatJonson, Bo

Search in DiVA

By author/editor
Ali, SharafatJonson, Bo
By organisation
Department of Built Environment and Energy Technology
In the same journal
Vacuum
Inorganic Chemistry

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 396 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf