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Study of SiN, SiON and Mg-Si-O-N thin films by spec-troscopic elipsometry
Ali, Sharafat
Linnaeus University, Faculty of Technology, Department of Built Environment and Energy Technology.
(Glass group)
ORCID iD:
0000-0003-1430-2862
Paul, Biplab
Magnusson, Roger
Jonson, Bo
Linnaeus University, Faculty of Technology, Department of Built Environment and Energy Technology.
(Glass group)
ORCID iD:
0000-0002-6020-3227
Eklund, Per
Birch, Jens
Show others and affiliations
2016 (English)
In:
Optics and photonics conference, 2-3 November, 2016, Linköping, Sweden, 2016
Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2016.
National Category
Ceramics and Powder Metallurgical Materials
Research subject
Natural Science, Physics; Technology (byts ev till Engineering), Glass Technology
Identifiers
URN:
urn:nbn:se:lnu:diva-72850
OAI: oai:DiVA.org:lnu-72850
DiVA, id:
diva2:1197844
Conference
Optics and photonics conference, 2-3 November, 2016, Linköping, Sweden
Available from:
2018-04-15
Created:
2018-04-15
Last updated:
2025-02-09
Bibliographically approved
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Ali, Sharafat
Jonson, Bo
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Ali, Sharafat
Jonson, Bo
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Department of Built Environment and Energy Technology
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Ceramics and Powder Metallurgical Materials
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ieee
modern-language-association-8th-edition
vancouver
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apa
ieee
modern-language-association-8th-edition
vancouver
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en-GB
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